English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
(翻訳，極低角度入射ビームオージェ深さ方向分析によるHfO2/Si基板の分析)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-04-03 03:00:19 +0900 Updated at: 2026-10-08 08:29:09 +0900