Non-invasive digital etching of van der Waals semiconductors

Jian Zhou; Chunchen Zhang; Li Shi; Xiaoqing Chen; Tae Soo Kim; Minseung Gyeon; Jian Chen; Jinlan Wang; Linwei Yu; Xinran Wang; Kibum Kang; Emanuele Orgiu; Paolo Samorì; Kenji Watanabe; Takashi Taniguchi; Kazuhito Tsukagoshi; Peng Wang; Yi Shi; Songlin Li

doi:10.1038/s41467-022-29447-6

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Non-invasive digital etching of van der Waals semiconductors

Jian Zhou, Chunchen Zhang, Li Shi, Xiaoqing Chen, Tae Soo Kim, Minseung Gyeon, Jian Chen, Jinlan Wang, Linwei Yu, Xinran Wang, Kibum Kang, Emanuele Orgiu, Paolo Samorì, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Peng Wang, Yi Shi, Songlin Li.

Nature Communications 13 [1] 1844. 2022.

https://doi.org/10.1038/s41467-022-29447-6

Open Access Springer Science and Business Media LLC (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2022-04-15 03:24:53 +0900更新時刻: 2024-03-31 16:30:40 +0900