HOME > 論文 > 書誌詳細Microfabrication of Silicon Using Self-Assembled Monolayer Resist and Metastable Helium BeamJianwu, ZHANG, KURAHASHI, Mitsunori, SUZUKI, Taku, SUN, Xia, YAMAUCHI, Yasushi. JAPANESE JOURNAL OF APPLIED PHYSICS 45 [10] 8020-8023. 2006.NIMS著者倉橋 光紀鈴木 拓Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 15:00:56 +0900 更新時刻: 2018-12-15 00:40:10 +0900
