HOME > Article > DetailMicrofabrication of Silicon Using Self-Assembled Monolayer Resist and Metastable Helium BeamJianwu, ZHANG, KURAHASHI, Mitsunori, SUZUKI, Taku, SUN, Xia, YAMAUCHI, Yasushi. JAPANESE JOURNAL OF APPLIED PHYSICS 45 [10] 8020-8023. 2006.NIMS author(s)KURAHASHI, MitsunoriSUZUKI, TakuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:00:56 +0900 Updated at: 2018-12-15 00:40:10 +0900
