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Unintended Carbon-Related Impurity and Negative Bias Instability in High-Mobility Oxide TFTs

Author(s)Yu-Shien Shiah, Kihyung Sim, Shigenori Ueda, Junghwan Kim, Hideo Hosono.
Journal titleIEEE Electron Device Letters 42 [9] 1319-1322
ISSN: 07413106, 15580563
ESI category: ENGINEERING
Publisher
Year of publication2021
LanguageEnglish
DOIhttps://doi.org/10.1109/led.2021.3101654
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