Patternable laser-oxidized Ta2O5 dielectric and TaS2 contact for optimizing subthreshold swing of MoS2 field-effect transistors

Kuan-Cheng Lu; Pen-Yuan Shih; Pin-Hsien Lin; Shih-Hao Wu; Kimitoshi Kono; Wen-Bin Jian; Yu-Han Lin; Yo-Yao Ho; Ching-Hwa Ho; Shin-Yuan Wang; Chao-Hsin Chien; Ching-Yu Chiang; Shu-Jui Chang; Yu-Che Huang; Kenji Watanabe; Takashi Taniguchi; Kazuhito Tsukagoshi; Chenming Hu; Kuan-Cheng Lu; Pen-Yuan Shih; Pin-Hsien Lin; Shih-Hao Wu; Kimitoshi Kono; Wen-Bin Jian; Yu-Han Lin; Yo-Yao Ho; Ching-Hwa Ho; Shin-Yuan Wang; Chao-Hsin Chien; Ching-Yu Chiang; Shu-Jui Chang; Yu-Che Huang; Kenji Watanabe; Takashi Taniguchi; Kazuhito Tsukagoshi; Chenming Hu

doi:10.1016/j.apsadv.2026.100955

HOME > 論文 > 書誌詳細

Patternable laser-oxidized Ta2O5 dielectric and TaS2 contact for optimizing subthreshold swing of MoS2 field-effect transistors

Kuan-Cheng Lu, Pen-Yuan Shih, Pin-Hsien Lin, Shih-Hao Wu, Kimitoshi Kono, Wen-Bin Jian, Yu-Han Lin, Yo-Yao Ho, Ching-Hwa Ho, Shin-Yuan Wang, Chao-Hsin Chien, Ching-Yu Chiang, Shu-Jui Chang, Yu-Che Huang, Kenji Watanabe, Takashi Taniguchi, Kazuhito Tsukagoshi, Chenming Hu.

Applied Surface Science Advances 32 100955. 2026.

https://doi.org/10.1016/j.apsadv.2026.100955

Open Access Elsevier BV (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2026-03-05 03:10:11 +0900 更新時刻: 2026-04-06 04:37:27 +0900