Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer
(Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer)

Ryan G. Banal, Masataka Imura, Yasuo Koide.

AIP Advances 5 [9] 097143. 2015.

https://doi.org/10.1063/1.4931159

Open Access AIP Publishing (Publisher)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 17:59:32 +0900更新時刻: 2024-03-31 18:42:02 +0900

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