Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer | SAMURAI, NIMS Researchers Directory Service

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Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer
(Influence of surface structure of (0001) sapphire substrate on the elimination of small-angle grain boundary in AlN epilayer)

Ryan G. Banal, Masataka Imura, Yasuo Koide.

AIP Advances 5 [9] 097143. 2015.

https://doi.org/10.1063/1.4931159

Open Access AIP Publishing (Publisher)

NIMS author(s)

IMURA, Masataka

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 17:59:32 +0900 Updated at: 2025-12-20 08:58:34 +0900

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