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Isotope effect of penetration of hydrogen and deuterium into silicon through Si/Sio2 interface
(Si/SiO2界面を通したSi中への水素、重水素進入過程の同位体効果)

Kouichi Murakami, Naoki Fukata, Kunie Ishioka, Masahiro Kitajima, Noriyuki Uchida, Kunitomo Morisawa, Haruhito Morihiro, Ryota Shirakawa, Masatoshi Tsujimura.

Japanese Journal of Applied Physics 48 [9] 091204. 2009.

https://doi.org/10.1143/jjap.48.091204

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Created at: 2016-05-24 15:58:53 +0900 Updated at: 2026-10-30 04:17:18 +0900

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