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AuthorKouichi Murakami, Naoki Fukata, Kunie Ishioka, Masahiro Kitajima, Noriyuki Uchida, Kunitomo Morisawa, Haruhito Morihiro, Ryota Shirakawa, Masatoshi Tsujimura.
TitleIsotope Effect of Penetration of Hydrogen and Deuterium into Silicon through Si/SiO2Interface
Journal titleJapanese Journal of Applied Physics 48 [9] 091204
ISSN: 13474065 00214922
Year of publication2009
LanguageEnglish
ESI categoryPHYSICS
DOIhttps://doi.org/10.1143/jjap.48.091204
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