HOME > Article > DetailIsotope effect of penetration of hydrogen and deuterium into silicon through Si/Sio2 interface(Si/SiO2界面を通したSi中への水素、重水素進入過程の同位体効果)Kouichi Murakami, Naoki Fukata, Kunie Ishioka, Masahiro Kitajima, Noriyuki Uchida, Kunitomo Morisawa, Haruhito Morihiro, Ryota Shirakawa, Masatoshi Tsujimura. Japanese Journal of Applied Physics 48 [9] 091204. 2009.https://doi.org/10.1143/jjap.48.091204 NIMS author(s)FUKATA, NaokiISHIOKA, KunieFulltext and dataset(s) on Materials Data Repository (MDR)Created at :2016-05-24 15:58:53 +0900 Updated at :2020-11-16 23:10:05 +0900