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Ordered Array of Polymer Microspheres on Patterned Silicon Substrate Fabricated Using Step-by-Step Deposition Method

著者Tsunenobu Onodera, Yosuke Takaya, Tadashi Mitsui, Yutaka Wakayama, Hidetoshi Oikawa.
掲載誌名Japanese Journal of Applied Physics 47 [2] 1404-1407
ISSN: 13474065, 00214922
ESIでのカテゴリ: PHYSICS
出版社Japan Society of Applied Physics
発表年2008
言語English
DOIhttps://doi.org/10.1143/jjap.47.1404
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