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Ordered array of polymer microspheres on patterned silicon substrate fabricated using step-by-step deposition method

Tsunenobu Onodera, Yosuke Takaya, Tadashi Mitsui, Yutaka Wakayama, Hidetoshi Oikawa.
Japanese Journal of Applied Physics 47 [2] 1404-1407. 2008.
https://doi.org/10.1143/jjap.47.1404

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