Uncovering the morphological effects of high-energy Ga<sup>+</sup> focused ion beam milling on hBN single-photon emitter fabrication

Uncovering the morphological effects of high-energy Ga+ focused ion beam milling on hBN single-photon emitter fabrication

著者	Rachael Klaiss, Joshua Ziegler, David Miller, Kara Zappitelli, Kenji Watanabe, Takashi Taniguchi, Benjamín Alemán.
掲載誌名	The Journal of Chemical Physics 157 [7] 074703 ISSN: 00219606 ESIでのカテゴリ: CHEMISTRY
出版社	AIP Publishing
発表年	2022
言語	English
DOI	https://doi.org/10.1063/5.0097581
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