Uncovering the morphological effects of high-energy Ga+ focused ion beam milling on hBN single-photon emitter fabrication

Author(s)	Rachael Klaiss, Joshua Ziegler, David Miller, Kara Zappitelli, Kenji Watanabe, Takashi Taniguchi, Benjamín Alemán.
Journal title	The Journal of Chemical Physics 157 [7] 074703 ISSN: 00219606 ESI category: CHEMISTRY
Publisher	AIP Publishing
Year of publication	2022
Language	English
DOI	https://doi.org/10.1063/5.0097581
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