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Uncovering the morphological effects of high-energy Ga+ focused ion beam milling on hBN single-photon emitter fabrication

Rachael Klaiss, Joshua Ziegler, David Miller, Kara Zappitelli, Kenji Watanabe, Takashi Taniguchi, Benjamín Alemán.
The Journal of Chemical Physics 157 [7] 074703. 2022.
https://doi.org/10.1063/5.0097581

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