Metastable-atom-stimulated desorption from hydrogen-passivated silicon surfaces
(水素保護シリコン表面からの準安定原子刺激脱離)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:40:27 +0900 Updated at: 2022-11-15 00:40:27 +0900