Effect of Boron Incorporation on Structural and Optical Properties of AlN Layers Grown by Metal-Organic Vapor Phase Epitaxy
著者 | Masataka Imura, Yuichi Ota, Ryan G. Banal, Meiyong Liao, Yoshiko Nakayama, Masaki Takeguchi, Yasuo Koide. |
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掲載誌名 | physica status solidi (a) 215 [21] 1800282 ISSN: 18626300, 18626319, 00318965 ESIでのカテゴリ: PHYSICS |
出版社 | Wiley |
発表年 | 2018 |
言語 | English |
DOI | https://doi.org/10.1002/pssa.201800282 |
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