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Effect of Boron Incorporation on Structural and Optical Properties of AlN Layers Grown by Metal-Organic Vapor Phase Epitaxy

著者Masataka Imura, Yuichi Ota, Ryan G. Banal, Meiyong Liao, Yoshiko Nakayama, Masaki Takeguchi, Yasuo Koide.
掲載誌名physica status solidi (a) 215 [21] 1800282
ISSN: 18626300, 18626319, 00318965
ESIでのカテゴリ: PHYSICS
出版社Wiley
発表年2018
言語English
DOIhttps://doi.org/10.1002/pssa.201800282
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