Influence of Oxygen Transfer in Hf-based High-k Dielectrics on Flatband Voltage Shift
(Hfからなるhigh-k誘電体で酸素移動がフラットバンド電圧シフトへ及ぼす影響)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-06-08 21:32:15 +0900 Updated at: 2026-11-04 05:45:18 +0900