HOME > Profile > OKADA, Katsuyuki
- Address
- 305-0044 1-1 Namiki Tsukuba Ibaraki JAPAN [Access]
Research
- Keywords
ナノクリスタルダイヤモンド、低圧誘導結合プラズマ、ＣＶＤ
PublicationsNIMS affiliated publications since 2004.
Research papers
- 守吉佑介, KOMATSU, Shojiro, OKADA, Katsuyuki, 加茂睦和, 瀬高信雄. The Microstructure of a Diamond Film prepared with microwave Plasma CVD. Thin Solid Films. (1990)
- OKADA, Katsuyuki, KOMATSU, Shojiro, 守吉佑介. Combustion-flame Deposition of Diamond. Journal of Chemical Vapor Deposition. (1992) 157-180
- 岡田勝行. 誘導結合型プラズマのダイヤモンド合成への応用. 化学と工業. (1995)
Proceedings
- OKADA, Katsuyuki. Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon Deposition. Proceedings of ISSP 2017. (2017) 283-285
- OKADA, Katsuyuki. Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon Deposition. Proceedings of ISSP 2015. (2015) 194-197
- OKADA, Katsuyuki. Simultaneous Growth of Carbon Nanotubes and Carbon Nanocapsules in a Low Pressure Inductively Coupled Plasma . Proceedings of ISSP 2013. (2013) 112-114
Presentations
- OKADA, Katsuyuki. Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon Deposition. The 12th International Symposium on Sputtering & Plasma Process. 2015
- OKADA, Katsuyuki. Diagnostics of Low Pressure Inductively Coupled VHF Plasma Used for Nanostructued Carbon Deposition. XXXIV International Conference on Phenomena in Ionized Gases(XXXIV ICPIG) & 10th International Conference on Reactive Plasmas(ICRP-10). 2019
- OKADA, Katsuyuki. Simultaneous Growth of Carbon Nanotubes and Carbon Nanocapsules in a Low Pressure Inductively Coupled Plasma . The 12th International Symposium on Sputtering & Plasma Process. 2013
Misc
- OKADA, Katsuyuki. Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanostructured Carbon Deposition. Proceedings of ISSP 2015. (2015) 194-197
- OKADA, Katsuyuki. Simultaneous Growth of Carbon Nanotubes and Carbon Nanocapsules in a Low Pressure Inductively Coupled Plasma . Proceedings of ISSP 2013. (2013) 112-114
- OKADA, Katsuyuki. Growth of Nanocarbons in a Low Pressure Inductively Coupled Plasma. Proceedings of ISSP 2011. (2011) 333-336
Patents
- No. 3783057 電界電子放出特性を利する自己造形的表面形状を有するｓｐ３結合性窒化ホウ素薄膜とその製造方法及びその用途 (2006)
- No. 1791859 プラズマを用いるダイヤモンドの合成法 (1993)
- No. 4677629 窒化ホウ素膜表面に先端の尖った結晶が自己相似性フラクタル模様を呈して電子放出に適った密度で二次元分布してなる窒化ホウ素薄膜エミッター (2011)
- No: 2005076035 電界電子放出特性を利する自己造形的表面形状を有するｓｐ３結合性窒化ホウ素薄膜とその製造方法及びその用途 (2005)
- No: 2004035301 一般式；ＢＮで示され、六方晶系５Ｈ型ないしは６Ｈ型多形構造を有し、紫外域で発光するｓｐ３結合型窒化ホウ素とその製造方法、及びこれを利用した機能性材料 (2004)
- No: H06102159 燃焼炎を用いたセラミックスの簡易エッチング法 (1994)