- Address
- 305-0044 茨城県つくば市並木1-1 [アクセス]
研究内容
- Keywords
Semiconductor Diamond, MEMS/NEMS, electronics, photoelectronics, devices physics
Novel MEMS/NEMS devices, Sensors, Field-effect transistors, Detectors, Devices Physics
出版物2004年以降のNIMS所属における研究成果や出版物を表示しています。
論文
- Mingchao Yang, Takehiro Shimaoka, Liwen Sang, Junichi H. Kaneko, Satoshi Koizumi, Meiyong Liao. Radiation effect of X-ray with 100 kGy dose on the electrical properties of MESFET based on hydrogen-terminated diamond surface conductivity. Functional Diamond. 2 [1] (2022) 40-45 10.1080/26941112.2022.2066481
- Xiulin Shen, Zhenfei Lv, Kimiyoshi Ichikawa, Huanying Sun, Liwen Sang, Zhaohui Huang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao. Stress effect on the resonance properties of single-crystal diamond cantilever resonators for microscopy applications. Ultramicroscopy. 234 (2022) 113464 10.1016/j.ultramic.2022.113464
- Huanying Sun, Liwen Sang, Xiulin Shen, Xuelin Yang, Tiefu Li, J. Q. You, Bo Shen, Meiyong Liao. Elastic strain engineered nanomechanical GaN resonators with thermoelastic dissipation dilution up to 600 K. Journal of Applied Physics. 131 [5] (2022) 054502 10.1063/5.0080227
書籍
- Bo Shen, Zhanguo Wang, LIAO, Meiyong, Ultra-wide Bandgap Semiconductor Materials. Elsevier, 2019
- LIAO, Meiyong. Impurities and Dopants in Diamond. Elsevier, 2019
- LIAO, Meiyong, Xiaohui Chang, Zhangcheng Liu, Hongxing Wang, KOIDE, Yasuo. Solar-blind deep-ultraviolet detectors. Elsevier, 2019
会議録
- L. Sang, H. Sun, X. Yang, T. Li, B. Shen, M. Liao. Self-Temperature-Compensated GaN MEMS Resonators through Strain Engineering up to 600 K. Technical Digest - International Electron Devices Meeting. 2020
- Z. Zhang, L. Sang, H. Wu, J. Huang, L. Wang, S. Koizumi, Y. Kodie, M. Liao. Galfenol-Ti-Diamond Multilayer MEMS Resonator for Magnetic Sensor Working up to 773 K. IEEE International Electron Devices Meeting (IEDM). 2019
- Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono. Pico-thermogravimetric material properties analysis using diamond cantilever beam. Proceedings of Transducers 2017. 2017
口頭発表
- SANG, Liwen, LIAO, Meiyong. Investigation of the seeding process of diamond growth on GaN for thermal management. 15th International Conference on New Diamond and Nano Carbons 2022 https://www.ndnc2022.org. 2022
- CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Xiaoxi Liu, LIAO, Meiyong. Effect of pressure on quality-factor of single-crystal diamond micro cantilevers. 15th International Conference on New Diamond and Nano Carbons (NDNC2022) https://www.ndnc2022.org/index.html. 2022
- CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Xiaoxi Liu, LIAO, Meiyong. Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators. E-MRS Spring Meeting 2022 https://www.european-mrs.com/advanced-carbon-materials-emrs. 2022
その他の文献
- 廖 梅勇, ジャン ジロン, 小出 康夫, 小泉 聡. ダイヤモンド MEMS磁気センサ. New diamond. (2020) 21-23
- Hong-Xing Wang, Chengming Li, Hongdong Li, Meiyong Liao, Zhenhui Kang, Nianjun Yang, Ping Yang. 10th International Conference on New Diamond and Nano Carbons – NDNC 2016. Diamond and Related Materials. (2017) A1 10.1016/j.diamond.2017.03.003
- 井村 将隆, 廖 梅勇, 小出 康夫. 窒化アルミニウム／ダイヤモンドヘテロ接合を用いた電界効果トランジスタ. NEW DIAMOND. 28 [2] (2012) 36-38
特許
- 特許第4123496号 ダイヤモンド紫外光センサー (2008)
- 特許第5158777号 ダイヤモンド半導体整流素子 (2012)
- 特許第4650491号 ダイヤモンド紫外光センサー (2010)
- 特開2007066976号 ダイヤモンド紫外線センサー (2007)
- 特開2007139424号 ダイヤモンド紫外線センサー素子 (2007)
- 特開2009188222号 ダイヤモンド紫外線センサー素子とその製造方法、紫外線センサー装置、ダイヤモンド単結晶の処理方法 (2009)
所属学会
応用物理学会 (2004)
受賞履歴
- Outstanding poster award, 2nd conference on NDNC2008 (New Diamond and Nano Carbons) ()