VUV/O3 Treatment for Reduction of Au-Au Bonding Temperature

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Akiko Okada, Masatsugu NImura, SHIGETOU, Akitsu, Katsuyuki Sakuma, Jun Mizuno, Syuichi Shoji.

Proc. ICEP 2013 289-293. 2013.

作成時刻: 2017-02-27 02:31:27 +0900更新時刻: 2017-03-17 04:43:30 +0900