HOME > Proceedings > DetailVUV/O3 Treatment for Reduction of Au-Au Bonding TemperatureAkiko Okada, Masatsugu NImura, SHIGETOU, Akitsu, Katsuyuki Sakuma, Jun Mizuno, Syuichi Shoji. Proc. ICEP 2013 289-293. 2013.NIMS author(s)SHIGETOU, AkitsuFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-27 02:31:27 +0900Updated at: 2017-03-17 04:43:30 +0900