HOME > 会議録 > 書誌詳細Effect of hydrogen radical on decomposition of chlorosilane source gasesMasatomo Sumiya, Tomohiro Akizuki, Kenji Itaka, Makoto Kubota, Kenta Tsubouchi, Takamasa Ishigaki, Hideomi Koinuma. JOURNAL OF PHYSICS:CONFERENCE SERIES 012003-1-012003-6. 2013.https://doi.org/10.1088/1742-6596/441/1/012003 NIMS著者角谷 正友Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 02:21:22 +0900更新時刻: 2024-04-01 23:28:37 +0900
