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Effect of hydrogen radical on decomposition of chlorosilane source gases
| Author(s) | Masatomo Sumiya, Tomohiro Akizuki, Kenji Itaka, Makoto Kubota, Kenta Tsubouchi, Takamasa Ishigaki, Hideomi Koinuma. |
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| Proceedings title | JOURNAL OF PHYSICS:CONFERENCE SERIES |
| Year of publication | 2013 |
| Language | English |
| DOI | https://doi.org/10.1088/1742-6596/441/1/012003 |