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Effect of hydrogen radical on decomposition of chlorosilane source gases

Author(s)Masatomo Sumiya, Tomohiro Akizuki, Kenji Itaka, Makoto Kubota, Kenta Tsubouchi, Takamasa Ishigaki, Hideomi Koinuma.
Proceedings titleJOURNAL OF PHYSICS:CONFERENCE SERIES
Year of publication2013
LanguageEnglish
DOIhttps://doi.org/10.1088/1742-6596/441/1/012003

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