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Effect of hydrogen radical on decomposition of chlorosilane source gases

Masatomo Sumiya, Tomohiro Akizuki, Kenji Itaka, Makoto Kubota, Kenta Tsubouchi, Takamasa Ishigaki, Hideomi Koinuma.
JOURNAL OF PHYSICS:CONFERENCE SERIES 012003-1-012003-6. 2013.
https://doi.org/10.1088/1742-6596/441/1/012003

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