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Control of crystal preferred orientation of ZnO thin films by combinatorial sputter coating system

GOTO, Masahiro, KASAHARA, Akira, TOSA, Masahiro.

Proceedings of ICCE-12 . 2005.

NIMS author(s)

GOTO, Masahiro

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-02-27 00:50:28 +0900 Updated at: 2017-03-17 02:51:06 +0900

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