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Passivation and reactivation of carrier in B- and P-doped Si treated with atomic hydrogen
(水素処理によるBおよびPドープシリコン中のキャリアの不活性化と再活性化)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:25:29 +0900Updated at: 2017-03-17 04:35:41 +0900