HOME > 会議録 > 書誌詳細Vapor-assisted hybrid bonding of inorganic/organic substrates for 3D hetero-integration(有機/無機材料3次元混混載のためのvapor-assisted接合手法)SHIGETOU, Akitsu, Tadatomo Suga. Proceedings of 3rd IEEE int'l Workshop on Low Temperature Bonding for 3D Integration 59-65. 2012.NIMS著者重藤 暁津Materials Data Repository (MDR)上の本文・データセット作成時刻 :2017-02-27 02:14:14 +0900 更新時刻 :2017-03-17 04:23:09 +0900