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Vapor-assisted hybrid bonding of inorganic/organic substrates for 3D hetero-integration
(有機/無機材料3次元混混載のためのvapor-assisted接合手法)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-27 02:14:14 +0900Updated at: 2017-03-17 04:23:09 +0900