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Impurity contamination and diffusion during the annealing in the implanted ZnO
(イオン注入した酸化亜鉛の熱処理による不純物汚染と拡散)

SAKAGUCHI, Isao, ADACHI, Yutaka, OGAKI, Takeshi, MATSUMOTO, Kenji, HISHITA, Shunichi, HANEDA, Hajime, OHASHI, Naoki.
KEY ENGINEERING MATERIALS 23-26. 2008.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2017-02-27 01:22:22 +0900Updated at: 2017-03-17 03:22:37 +0900

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