HOME > 会議録 > 書誌詳細Vacuum Ultraviolet (VUV) and Vapor-Combined Surface Modification for Hybrid Bonding of SiC, GaN, and Si Substrates at Low TempeSHIGETOU, Akitsu, Jun Mizuno, Syuichi Shoji. Proc. 2015 ECTC 1498-1501. 2015.NIMS著者重藤 暁津Materials Data Repository (MDR)上の本文・データセット作成時刻: 2017-02-27 02:43:21 +0900更新時刻: 2017-03-17 04:57:38 +0900
