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SiO2/Si 試料の電子線損傷に関するVAMASラウンドロビン試験結果
(Summary of the VAMAS Round-Robin Test for Practical Analyses on the Electron Beam Damage to SiO2/Si Specimens)
ECASIA 2011. 2011.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:53:12 +0900Updated at: 2017-07-10 21:09:40 +0900