HOME > Presentation > DetailSi2H6を用いたSiC薄膜の低温合成(Low Temperature Synthesis of SiC Thin Film from Si2H6)鈴木 裕, 荒木 弘, 土佐 正弘, 野田 哲二. 日本金属学会2006年秋期大会. 2006.NIMS author(s)SUZUKI, HiroshiTOSA, MasahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:59:43 +0900Updated at: 2017-07-10 19:41:57 +0900