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SiO2/4H-SiC界面における界面準位と界面構造の相関
(Atomic Structures and Interface States at SiO2/4H-SiC Interface)
第82回応用物理学会秋季学術講演会. September 10, 2021-September 13, 2021.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2021-11-12 03:38:16 +0900 Updated at: 2021-11-12 03:38:16 +0900