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シリコン中の水素の深さ濃度分布と局所振動モードの関係
(Relationship between depth profiles and localized vibrational modes of hydrogen in silicon)

福田真也, 森俊樹, 森澤邦友, 石岡 邦江, 北島 正弘, 坂口 勲, 菱田 俊一, 村上浩一.
2002秋季第63回応用物理学会学術講演会. September 24, 2002-September 27, 2002.

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    Created at: 2017-02-18 02:43:38 +0900 Updated at: 2018-05-30 18:54:12 +0900

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