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極高真空空間における磁気浮上搬送による真空装置間基板受け渡しシステムの開発
(Substrate delivery system among vacuum instruments in an extreme high vacuum with magnetic levitation transport)
全米真空学会. October 20, 1997-October 24, 1997.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:21:46 +0900 Updated at: 2017-07-10 17:45:16 +0900