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試料冷却ステージを用いたInP/GaInAsP多層膜のオージェ深さ方向分析
(Auger Depth Profiling Analyses of InP/GaInAsP Multilayer Thin Films Using a Sample Cooling Stage)
ECASIA’09. 2009.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:25:17 +0900Updated at: 2017-07-10 20:31:58 +0900