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サファイアm面基板上へのScN薄膜のヘテロエピタキシャル成長
(Heteroepitaxial growth of scandium nitride films on m-face sapphire substrates)
The 8th International Conference on the Science and Technolog. 2014.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:57:25 +0900Updated at: 2017-07-10 21:53:41 +0900