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(Nitrogen diffusivity in aluminum nitride studied using [Al15N]/[Al14N] multilayers)
MS&T Materials Science & Technology Conference & Exhibition 2010. October 17, 2010-October 21, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:52:24 +0900Updated at: 2017-07-10 20:56:05 +0900