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SiO2の電子線照射損傷への表面炭素汚染の影響
(Surface damage on SiO2/Si specimen caused by electron beam irradiation, about effect of surface pollution)
第54回応用物理学関係連合講演会. March 27, 2007-March 30, 2007.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:52:27 +0900 Updated at: 2017-07-10 19:52:21 +0900