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低圧CVD法による非金属基板上への深紫外発光性六方晶窒化ホウ素の薄膜堆積
(Low pressure chemical vapor phase deposition of ultraviolet-luminous hexagonal boron nitride thin films on non-metallic substrat)
第23回ダイヤモンドシンポジウム. 2009.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:49:49 +0900Updated at: 2017-07-10 20:38:49 +0900