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微細加工技術を用いた薄膜型熱電デバイスの開発
(Development of thin-film-based in-plane π-type thermoelectric devices by microfabrication)
第70回 応用物理学会 春季学術講演会. March 15, 2023-March 18, 2023.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-03-21 03:32:49 +0900Updated at: 2023-03-21 03:32:49 +0900