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Solid Phase Epitaxy of Si Film on poly-Si Seed Layer formed by Aluminum-induced Crystallization
The 76th JSAP Autumn Meeting 2015. September 13, 2015-September 16, 2015.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:10:06 +0900 Updated at: 2017-07-10 22:11:54 +0900