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Solid Phase Epitaxy of Si Film on poly-Si Seed Layer formed by Aluminum-induced Crystallization

Joko Suwardy, ジェバスワン ウイパコーン, Kaoru Toko, Takashi Suemasu, 深田 直樹.
The 76th JSAP Autumn Meeting 2015. 2015.

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    Created at: 2017-01-08 04:10:06 +0900Updated at: 2017-07-10 22:11:54 +0900

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