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マグネトロンスパッタ共蒸着法を用いた超高真空中における窒化ホウ素－銅混合低摩擦コーティング
(Low frictional force coating of boron nitride-copper complex for ultra high vacuum by magnetron co-sputtering technique.)
AVS 48th International Symposium. October 29, 2001-November 02, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 02:23:40 +0900 Updated at: 2018-05-21 18:45:35 +0900