(Combinatorial Materials Exploration for Gate Stack Structures of Metal Gate Electrodes and High-κ Dielectric Films)
NIMS-MPI-MF workshop. 2005.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-25 00:59:40 +0900更新時刻: 2017-07-10 19:23:40 +0900