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窒化アルミニウム同位体多層構造の作製と窒素拡散特性
(Growth of isotopic multilayer structures of aluminum nitride and characterization of nitrogen diffusibity)
AMF-AMEC-2010. June 28, 2010-July 01, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:56:18 +0900Updated at: 2017-07-10 20:48:18 +0900