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PLD法で作製したSnO2薄膜のセンサ特性の膜厚依存性
(Thickness Dependence of Sensing Performances of SnO2 Thin Films Prepared by Pulsed Laser Deposition)
ICC 3rd International Congress on Ceramics. November 14, 2010-November 18, 2010.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 05:00:50 +0900Updated at: 2017-07-10 20:52:22 +0900