(Combinatorial Materials Exploration for Gate Stack Structures of Metal Gate Electrodes and High-κ Dielectric Films)
2005 MRS Fall Meeting. 2005.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-25 01:05:45 +0900更新時刻: 2017-07-10 19:30:00 +0900