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Development of compact 4 probe AFM/KFM for investigation of electrical property in nanoscale

著者SHINGAYA, Yoshitaka, MIAO, Difei, XU, Jianxun, CREASEY, Rhiannon, AONO, Masakazu, NAKAYAMA, Tomonobu.
会議名27th International Microprocesses and Nanotechnology Conference
発表年2014
言語English

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