HOME > Presentation > DetailLow frictional ZnO thin films synthesized by a combinatorial sputter coating systemGOTO, Masahiro, SASAKI, Michiko, KASAHARA, Akira, TOSA, Masahiro. IVC-19. September 09, 2013-September 13, 2013.NIMS author(s)GOTO, MasahiroKASAHARA, AkiraTOSA, MasahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 03:39:50 +0900Updated at: 2017-07-10 21:37:10 +0900