HOME > Presentation > Detail
傾斜ホルダーを利用したオージェ電子分光法による角度分解計測および低角度イオン入射深さ方向分析の検討
(An ultra high resolution depth profiling method and angle resolved measurements by AES using a inclined holder. )
第２８回表面科学学術講演会. November 13, 2008-November 15, 2008.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:46:56 +0900Updated at: 2017-07-10 20:20:44 +0900