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Structural Property of Boron-doped AlN grown by Metal-Organic Vapor Phase Epitaxy
(MOVPE法により成長させたボロンドープAlNの構造評価)
電子材料シンポジウム35. July 06, 2016-July 08, 2016.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-26 21:13:49 +0900 Updated at: 2018-06-05 13:58:27 +0900